TY  - BOOK
AU  - Hsu, Tai-ran
TI  - MEMs And Microsystems: Design And Manufacture: Design And Manufacture
U1  - 664 
PY  - 2012///
PB  - TMH
KW  - Electronics
KW  - Biotechnology
KW  - microelectromechanical
KW  - microelectronics
ER  -