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| 003 | AVIT | ||
| 005 | 20211120081257.0 | ||
| 008 | 131218s2012 ||||||||||||||||| ||und|d | ||
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_aMEMs And Microsystems: Design And Manufacture _bDesign And Manufacture _cHsu, Tai-ran |
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_bTMH _c2012 |
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| 653 | _amicroelectromechanical | ||
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